JPS6315679Y2 - - Google Patents
Info
- Publication number
- JPS6315679Y2 JPS6315679Y2 JP5823182U JP5823182U JPS6315679Y2 JP S6315679 Y2 JPS6315679 Y2 JP S6315679Y2 JP 5823182 U JP5823182 U JP 5823182U JP 5823182 U JP5823182 U JP 5823182U JP S6315679 Y2 JPS6315679 Y2 JP S6315679Y2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- pore
- notch
- purge device
- connecting member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010926 purge Methods 0.000 claims description 41
- 239000011148 porous material Substances 0.000 claims description 32
- 239000007789 gas Substances 0.000 description 51
- 239000011261 inert gas Substances 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000012856 packing Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 231100000331 toxic Toxicity 0.000 description 2
- 230000002588 toxic effect Effects 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000002341 toxic gas Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5823182U JPS58161297U (ja) | 1982-04-21 | 1982-04-21 | ガスパ−ジ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5823182U JPS58161297U (ja) | 1982-04-21 | 1982-04-21 | ガスパ−ジ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58161297U JPS58161297U (ja) | 1983-10-27 |
| JPS6315679Y2 true JPS6315679Y2 (en]) | 1988-05-02 |
Family
ID=30068631
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5823182U Granted JPS58161297U (ja) | 1982-04-21 | 1982-04-21 | ガスパ−ジ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58161297U (en]) |
-
1982
- 1982-04-21 JP JP5823182U patent/JPS58161297U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58161297U (ja) | 1983-10-27 |
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